<http://purl.org/allie/id/longform/793482>	<http://www.w3.org/2000/01/rdf-schema#label>	"High Density Plasma Chemical Vapor Deposition"@en .
<http://purl.org/allie/id/pair/5983209>	<http://purl.org/allie/ontology/201108#hasLongFormOf>	<http://purl.org/allie/id/longform/793482> .
<http://purl.org/allie/id/longform/793482>	<http://purl.org/allie/ontology/201108#frequency>	"1" .
<http://purl.org/allie/id/longform/793482>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://purl.org/allie/ontology/201108#LongForm> .